Digital Linear Control System for a Magnetic Bearing System of a High Vacuum Turbomolecular Pump
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of the Korean Vacuum Society
سال: 2010
ISSN: 1225-8822
DOI: 10.5757/jkvs.2010.19.4.256